Sensor fabrication by micromachining.
نویسندگان
چکیده
منابع مشابه
Fabrication of an integrated high-quality-factor (high-Q) optofluidic sensor by femtosecond laser micromachining.
We report on fabrication of a microtoroid resonator of a high-quality factor (i.e., Q-factor of ~3.24 × 10(6) measured under the critical coupling condition) integrated in a microfluidic channel using femtosecond laser three-dimensional (3D) micromachining. Coupling of light into and out of the microresonator has been realized with a fiber taper that is reliably assembled with the microtoroid. ...
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 1989
ISSN: 1882-675X,0912-0289
DOI: 10.2493/jjspe.55.1557